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\u0623\u062d\u062f \u0623\u0647\u0645 \u0627\u0644\u0627\u0628\u062a\u0643\u0627\u0631\u0627\u062a \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0629 \u0641\u064a \u0645\u062c\u0627\u0644 \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0636\u0648\u0626\u064a \u0647\u0648 \u0635\u0646\u0639 \u0645\u062c\u0647\u0631 \u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a \u0641\u0627\u0626\u0642 \u0627\u0644\u062f\u0642\u0629 \u0627\u0644\u062a\u0642\u0633\u064a\u0645 (HRSEM). \u062a\u0648\u0641\u0631 \u0647\u0630\u0647 \u0627\u0644\u062a\u0642\u0646\u064a\u0629 \u062a\u0635\u0645\u064a\u0645\u064b\u0627 \u063a\u064a\u0631 \u0645\u0633\u0628\u0648\u0642\u060c \u0645\u0645\u0627 \u064a\u0633\u0645\u062d \u0644\u0644\u0645\u0646\u062a\u062c \u0628\u0645\u0631\u0627\u0642\u0628\u0629 \u0634\u0645\u0648\u0644\u064a\u0629 \u0648\u0647\u064a\u0627\u0643\u0644 \u0627\u0644\u0630\u0631\u0629 \u062c\u064a\u062f. HRSEM \u0645\u0641\u064a\u062f \u062c\u062f\u064b\u0627 \u0641\u064a \u062a\u062d\u0633\u064a\u0646 \u0627\u0644\u0635\u062d\u0629 \u0627\u0644\u0639\u0627\u0645\u0629\u060c \u062d\u064a\u062b \u064a\u062a\u0645 \u062a\u0646\u0627\u0648\u0644 \u0627\u0644\u0643\u062b\u064a\u0631 \u0645\u0646 \u0627\u0644\u062a\u0641\u0627\u0635\u064a\u0644 \u0627\u0644\u062f\u0642\u064a\u0642\u0629 \u0644\u0644\u0645\u062e\u0637\u0637 \u0628\u0634\u0643\u0644 \u0646\u0642\u062f\u064a. \u0645\u0639 \u0647\u0630\u0647 \u0627\u0644\u0625\u0645\u0643\u0627\u0646\u064a\u0629 \u0627\u0644\u0645\u0628\u062a\u0643\u0631\u0629 \u0644\u0644\u062a\u0635\u0648\u0631\u060c \u064a\u0645\u0643\u0646 \u0644\u0644\u0645\u0647\u0646\u062f\u0633\u064a\u0646 \u0645\u0639\u0627\u0644\u062c\u0629 \u0639\u064a\u0648\u0628 \u0627\u0644\u0630\u0631\u0629\u060c \u0648\u0647\u0648 \u0645\u0627 \u064a\u0645\u0643\u0646 \u0623\u0646 \u064a\u062d\u062f\u062b \u0627\u0644\u0627\u0633\u062a\u0641\u0627\u062f\u0629 \u0645\u0646 \u0627\u0644\u0645\u0643\u0648\u0646\u0627\u062a \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0627\u0644\u0623\u0639\u0644\u0649 \u0625\u0646\u062a\u0627\u062c\u064a\u0629 \u0648\u0642\u064a\u0645\u0629.<\/p>\n
\u064a\u064f\u062d\u062f\u062b \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0646\u0641\u0642\u064a \u0627\u0644\u0645\u0627\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a (STM) \u062b\u0648\u0631\u0629 \u0641\u064a \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u0648\u0644\u062f\u0629 \u0644\u0644\u0630\u0631\u0629. \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0625\u0631\u0634\u0627\u062f\u0627\u062a \u0623\u0648\u0644\u064a\u0629 \u0642\u062f\u064a\u0645\u0629\u060c \u0633\u0631\u064a\u0639\u0629 \u062c\u062f\u064b\u0627 \u0625\u0644\u0649 \u0623\u0639\u0644\u0649 \u0627\u0644\u0625\u0645\u062f\u0627\u062f\u060c \u064a\u0645\u0643\u0646 \u0644\u0640 STM \u062a\u0642\u062f\u064a\u0645 \u0627\u0644\u062f\u0639\u0645 \u0627\u0644\u0641\u0639\u0644\u064a \u0627\u0644\u062a\u0635\u0648\u064a\u0631 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a \u0637\u0628\u064a\u0639\u064a. \u0623\u062f\u062a \u0627\u0644\u0627\u0628\u062a\u0643\u0627\u0631\u0627\u062a \u0627\u0644\u0644\u0627\u062d\u0642\u0629 \u0625\u0644\u0649 \u0642\u062f\u0631\u062a\u0647\u0627 \u0639\u0644\u0649 \u0627\u0644\u062a\u0644\u0627\u0639\u0628 \u0628\u0627\u0644\u0630\u0631\u0627\u062a \u0627\u0644\u0645\u062a\u0641\u0648\u0642\u0629\u060c \u0648\u0625\u0637\u0644\u0627\u0642 \u0627\u0644\u0639\u0646\u0627\u0646 \u0644\u0623\u0634\u0643\u0627\u0644 \u062c\u062f\u064a\u062f\u0629 \u0645\u0646 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0627\u062a \u0627\u0644\u0646\u0627\u0646\u0648\u064a\u0629 \u0648\u0627\u0644\u0643\u0645\u064a\u0629 \u0627\u0644\u0645\u062a\u0632\u0627\u064a\u062f\u0629. \u064a\u062a\u0639\u0631\u0641 \u0627\u0644\u062c\u064a\u0644 \u0627\u0644\u0633\u0627\u0628\u0642 \u0639\u0644\u0649 \u0643\u064a\u0641\u064a\u0629 \u062f\u0645\u062c \u0647\u0630\u0647 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0645\u0639 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0645\u062a\u0637\u0648\u0631\u0629 \u0627\u0644\u0623\u062e\u0631\u0649 \u0625\u0644\u0649 \u062c\u0647\u0627\u0632 \u0643\u0628\u064a\u0631 \u0648\u0641\u0639\u0627\u0644.<\/p>\n
\u064a\u062d\u062a\u0648\u064a \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0633\u064a\u0644\u0641\u064a \u0627\u0644\u0630\u0631\u064a (AFM) \u0639\u0644\u0649 \u0644\u0639\u0628\u0629 \u0631\u0626\u064a\u0633\u064a\u0629 \u0648\u0627\u062d\u062f\u0629 \u0641\u0642\u0637 \u0641\u064a \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0623\u0631\u0636\u064a. \u0644\u0642\u062f \u0623\u062f\u0649 \u0627\u0644\u0639\u0631\u0636 \u0627\u0644\u0623\u062e\u064a\u0631 \u0641\u064a \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 AFM \u0625\u0644\u0649 \u0639\u062f\u0645 \u0627\u0644\u0642\u062f\u0631\u0629 \u0639\u0644\u0649 \u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u0645\u062a\u0641\u0648\u0642\u0629 \u0641\u062d\u0633\u0628\u060c \u0628\u0644 \u0625\u0646\u0647\u0627 \u0643\u0630\u0644\u0643 \u0627\u0644\u0622\u0644\u0627\u062a \u0627\u0644\u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0648\u0627\u0644\u0643\u0647\u0631\u0628\u0627\u0626\u064a\u0629 \u0648\u0627\u0644\u062a\u062f\u0641\u0626\u0629. \u062a\u0631\u062a\u0628\u0637 \u0627\u0644\u0623\u0646\u0638\u0645\u0629 \u0627\u0644\u0647\u062c\u064a\u0646\u0629 \u0627\u0644\u062c\u062f\u064a\u062f\u0629 \u0628\u0640 AFM \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0637\u0631\u0642 \u0623\u062e\u0631\u0649\u060c \u0645\u062b\u0644 \u0627\u0644\u062a\u062d\u0644\u064a\u0644 \u0627\u0644\u0637\u064a\u0641\u064a \u0628\u0627\u0644\u0623\u0634\u0639\u0629 \u062a\u062d\u062a \u0627\u0644\u062d\u0645\u0631\u0627\u0621\u060c \u0645\u0645\u0627 \u064a\u0633\u0627\u0639\u062f \u0639\u0644\u0649 \u062a\u062d\u0642\u064a\u0642 \u0627\u0644\u0646\u062c\u0627\u062d \u0627\u062d\u0635\u0644 \u0639\u0644\u0649 \u0628\u064a\u0627\u0646\u0627\u062a \u0625\u0636\u0627\u0641\u064a\u0629 \u0645\u0646 \u062a\u062c\u0631\u0628\u0629 \u0648\u0627\u062d\u062f\u0629. \u0648\u0647\u0630\u0627 \u064a\u0633\u0645\u062d \u0628\u0634\u0643\u0644 \u0643\u0628\u064a\u0631 \u0628\u0627\u0633\u062a\u062e\u062f\u0627\u0645 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u0645\u062a\u0646\u0648\u0639\u0629 \u0627\u0644\u062a\u064a \u062a\u0639\u062a\u0628\u0631 \u0645\u0647\u0645\u0629 \u062c\u062f\u064b\u0627 \u0644\u062a\u0635\u0646\u064a\u0639 \u0627\u0644\u0645\u0648\u0627\u062f \u0627\u0644\u062c\u062f\u064a\u062f\u0629 \u0627\u0644\u062e\u0635\u0627\u0626\u0635 \u0627\u0644\u0645\u0645\u064a\u0632\u0629.<\/p>\n
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\u064a\u0633\u062a\u062e\u062f\u0645 \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0645\u0633\u062d\u064a \u0637\u0631\u0642\u064b\u0627 \u0645\u062e\u062a\u0644\u0641\u0629 \u0645\u062b\u0644 \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a \u0627\u0644\u0645\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a (SM), \u0627\u0644\u0645\u0633\u062d \u0627\u0644\u0636\u0648\u0626\u064a \u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0646\u0641\u0642\u064a (STTM) \u0648\u0627\u0644\u0645\u062c\u0647\u0631 \u0627\u0644\u0630\u0631\u064a \u0627\u0644\u0633\u064a\u0644\u0641\u064a (ASCM). \u0645\u0646 \u062e\u0644\u0627\u0644 \u0647\u0630\u0647 \u0627\u0644\u0623\u0633\u0627\u0644\u064a\u0628 \u062a\u0644\u0639\u0628 \u062f\u0648\u0631\u064b\u0627 \u0631\u0626\u064a\u0633\u064a\u064b\u0627 \u0641\u064a \u062a\u0643\u0646\u0648\u0644\u0648\u062c\u064a\u0627 \u0627\u0644\u0645\u0639\u0644\u0648\u0645\u0627\u062a\u060c \u0645\u0645\u0627 \u064a\u0648\u0641\u0631 \u0631\u0624\u064a\u0629 \u0648\u0627\u0636\u062d\u0629 \u0648 \u062a\u0635\u0648\u0631 \u062a\u0641\u0635\u064a\u0644\u064a \u0644\u0625\u0645\u0643\u0627\u0646\u064a\u0629 \u0627\u0644\u0631\u0624\u064a\u0629. \u0639\u0644\u0649 \u0633\u0628\u064a\u0644 \u0627\u0644\u0645\u062b\u0627\u0644\u060c \u064a\u0633\u0645\u062d STM \u0628\u0627\u0633\u062a\u062e\u0644\u0627\u0635 \u0623\u0641\u0636\u0644 \u0627\u0644\u0623\u0634\u0643\u0627\u0644 \u0627\u0644\u0645\u0648\u0631\u0641\u0648\u0644\u0648\u062c\u064a\u0629 \u0644\u0644\u0645\u0648\u0627\u062f\u060c \u0645\u0645\u0627 \u064a\u0648\u0641\u0631 \u062a\u0646\u0648\u0639\u064b\u0627 \u0643\u0628\u064a\u0631\u064b\u0627 \u0627\u0644\u062a\u0635\u0648\u064a\u0631 \u0641\u064a \u0627\u0644\u0648\u0642\u062a \u0627\u0644\u0630\u064a \u062a\u062a\u064a\u062d \u0641\u064a\u0647 \u0623\u062f\u0648\u0627\u062a STM \u0648ASM \u0627\u0644\u062d\u0635\u0648\u0644 \u0639\u0644\u0649 \u0645\u0639\u0644\u0648\u0645\u0627\u062a \u0625\u0644\u0643\u062a\u0631\u0648\u0646\u064a\u0629 \u0648 \u0645\u0648\u0627\u062f \u0645\u064a\u0643\u0627\u0646\u064a\u0643\u064a\u0629 \u0645\u062a\u064a\u0646\u0629.<\/p>\n
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